玻璃基板,晶圓專用Mapping bar

  • 檢測碳化矽,藍寶石,矽片等半透明晶片。
  • 適用於6,8和12英寸的晶圓
  • 半透明晶圓模式(8和12寸機型)
  • 無靜電效應(梳狀傳感器單元)

晶圓貼片傳感器可以加快檢測過程,同時保持可靠的檢測。

ASW-SG625AP

Rating/Performance/Specification

Applicable Wafer 6 inch transmittance: 30% or less
Number of channels 25ch
Wafer pitch 4.76mm
Detection method Through beam
Comb Replaceable
Power supply DC24V ±10% ripple 10% or less
Current consumption 250mA or less
Operation mode Dark ON
ON/OFF when trouble
Output mode NPN open collector
Rating: sink current 30VDC or less, 20mA or less
Response time 12ms or less
Light source Infrared LED (830nm)
Light emission
inhibit input / re-teaching
(self diagnosis function)
Open collector input or contact input Light emission inhibit ON: 1.5V or less OFF: 4V or more
Light emission inhibit at ON
Re-teaching at OFF.
Output inhibit input Open collector or contact input
Output inhibit ON: 1.5V or less OFF: 4V or more
Connection Attached cable with connector (Fujitsu FCN-361J040-AU)
Cable length: 3m
Material Sensor unit : Polycarnonate
Housing : Aluminum
Mass Approx. 330g
Accessories Operation manual